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COURSE SYLLABUS

ELT 237 VACUUM AND POWER RF SYSTEMS

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6. COURSE OBJECTIVES:
The following list of course goals will be addressed in the course.  These goals are directly related to the performance objectives (ADDENDUM A).

(* designates a CRUCIAL goal)

*1. Describe relationship between pressure and vacuum.
*2. Define physical basis for turbulent flow.
3. Explain rise of vacuum.
*4. Define the plasma processing.
*5. Analyze integrated circuit fabrication.
*6. Analyze the reasons for use of vacuum processing.
7. Define common units of pressure.
8. Perform conversions.
*9. Define common use of vacuum.
*10. Describe forces related to pressure differentials in each vacuum range.
*11. Apply kinetic theory of gases.
12. Identify common system components.
*13. Apply Brownian motion.
*14. Demonstrate DC self-bias.
15. Define physical pressure.
*16. Identify contaminants.
17. Define physical properties of four states of matter.
*18. Identify gas leaks.
*19. Define viscous flow.
*20. Define intermediate flow.
21. Define molecular flow.
22. Define conductance.
*23. Calculate pumping speed.
*24. Calculate throughput.
*25. Calculate conductance.
26. Explain history of vacuum.
*27. Use of gas laws.
*28. Describe equipment used for vacuum leak detection.
*29. Identify permeation.
*30. Define heat transfer by convection.
31. Define conduction.
32. Define radiation.
33. Understanding relationship between common vacuum materials.
*34. Describe pressure range.
35. Describe pressure tools.
*36. Describe operation and maintenance of vacuum gauges used in process vacuum tools.
*37. Describe residual gas analysis operation principles.
*38. Use of RGA.
39. Define terms for hase changes.
*40. Describe leak detection methods.
*41. Use accepted cleaning procedures.
*42. Describe relation to wafer processing.
*43. Identify vacuum materials.
*44. Identify sources of gas found in a vacuum system.
*45. Describe materials handling techniques.
*46. Describe safety precautions.
*47. Describe radio frequency subsystem function.
*48. Describe placement of components for RF generation.
*49. Describe the power transfer into vacuum process.
*50. Describe RF power supplies functions.
51. Describe impedance matching network.
*52. Apply physical and chemical processes in glow discharges.
*53. Demonstrate plasma structure.
54. Demonstrate potentials.
*55. Interpret RGA spectra.
SCANS:

(Secretary of Labor’s Commission on Achieving Necessary Skills and Workplace Competency

 
  • Selects goal-relevant activities, ranks them, allocates time, and prepares and follows schedules.
  • Acquires and evaluates information.
  • Organizes and maintains information.
  • Interprets and communicates information.
  • Uses computers to process information.
  • Participates as a member of a team:  Contributes to group effort.
  • Teaches others new skills.
  • Works well with men and women from diverse backgrounds.
  • Knows how social, organizational, and technological systems work and operates effectively with them.
  • Distinguishes trends, predicts impacts on system operations, diagnoses system’s performance, and correct malfunctions.
  • Suggests modifications to existing systems and develops new or alternative systems to improve performance.
  • Chooses procedures, tools, or equipment including computers and related technologies.
  • Understands overall intent and proper procedures for setup and operation of equipment.
  • Prevents, identifies, or solves problems with equipment including computers and other technologies.
  • Locates, understands, and interprets written information in prose and in documents such as manuals, graphs, and schedules.
  • Communicates thoughts, ideas, information, and messages in writing; creates documents such as letters, directions, manuals, reports, graphs, and flow charts.
  • Performs basic computations; uses basic numerical concepts such as whole numbers, etc.
  • Approaches practical problems by choosing appropriately from a variety of mathematical techniques.
  • Receives, attends to, interprets, and responds to verbal messages and other cues.
  • Organizes ideas and communicates orally.
  • Generates new ideas.
  • Specifies goals and constraints, generates alternatives, considers risks, and evaluates and chooses best alternative.
  • Recognizes problems and devises and implements plan of action.
  • Organizes and processes symbols, pictures, graphs, objects, and other information.
  • Uses efficient learning techniques to acquire and apply new knowledge and skills.
  • Discovers a rule or principle underlying the relationship between two or more objects and applies it when solving a problem.
  • Exerts a high level of effort and perseveres towards goal attainment.
  • Believes in own self-worth and maintains a positive view of self.
  • Demonstrates understanding, friendliness, adaptability, empathy, and politeness in group settings.
  • Assesses self accurately, sets personal goals, monitors progress, and exhibits self-control.
  • Chooses ethical courses of action.
8. COURSE OUTLINE:
Tentative Schedule

ADDENDUM A

PERFORMANCE OBJECTIVES

1. The student will demonstrate a working knowledge of content goals 1, 2, 3, 8, and 9.  Performance will be satisfactory if the student successfully completes the lab experiments.
2. The student will demonstrate a working knowledge of content goals 4, 5, 14, 20, 23, 30, and 31.  Performance will be satisfactory if the student successfully completes the lab experiments.
3. The student will demonstrate a working knowledge of content goals 6, 7, 10, 15, 17, 27, and 41.  Performance will be satisfactory if the student successfully completes the lab experiments.
4. The student will demonstrate a working knowledge of content goals 33, 37, 28, 44, 47, and 49.  Performance will be satisfactory if the student successfully completes the lab experiments.
5. The student will demonstrate a working knowledge of content goals 10, 13, 17, 21, 25, and 51.  Performance will be satisfactory if the student successfully completes the lab experiments.
6. The student will demonstrate a working knowledge of content goals 24, 26, 36, 37, and 52.  Performance will be satisfactory if the student successfully completes the lab experiments.
7. The student will demonstrate a working knowledge of content goals 53 and 54.  Performance will be satisfactory if the student successfully completes the lab experiments.