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COURSE SYLLABUS

1. TITLE OF COURSE: VACUUM AND POWER RF SYSTEMS
  PREFIX/NUMBER: ELT 237 CREDIT HOURS: 3.0
2. PREREQUISITE: PHY 105, ELT 106
3.

RESOURCES NEEDED:

TEXT:

MKS Manuals

SUPPLIES:

Scientific calculator, clean room garments, notebook, 3 ½ HD floppy diskettes, and pencil
4.

COURSE DESCRIPTION:

Covers vacuum systems and RF (radio frequency) energy sources in the manufacture of semiconductor devices.  Includes gas laws and gas properties, vacuum pumps, gauges and valves, and leak detection techniques.  Addresses plasma physics, RF generators, transmission lines, RF interference, and safety.
5.

COURSE GOAL:

The course provides the concepts and skills needed to perform maintenance and operation of vacuum process equipment for semiconductor and other vacuum manufacturing processes.  The student will acquire knowledge and be able to perform.
6. COURSE OBJECTIVES:
7. EVALUATION PROCEDURES: 

The student will be graded on his/her demonstrated skills at understanding and applying Advanced Semiconductor Manufacturing Process. 

You will be given laboratory assignments.  These must be completed on time in order to receive full credit.

Labs 10%
Quizzes 10%

Exams

60%

Final Exam 

20%
            Grading Scale
Raw Score Range Letter Grade
90 to 100 A
80 to 89 B
70 to 79 C
60 to 69 D
Below 60 F

Special Remarks:

1.

Attendance:  College policy states that students may be dropped from enrollment when absent 20% of the scheduled class meetings.  If enrolled from the beginning of the term, 15 hours will usually constitute 20% of a four-credit semester course which meets five hours per week.  Reinstatement procedures are described in the PCC catalog.

2.

Tardy Policy:  A student who is late three times (enters classroom after the instructor has taken roll) will be charged with one full absence unless the student can provide valid reasons for one or more of these tardies.

3.

Assignments/Missed Exams:  It is the student's responsibility, whether present or absent, to obtain all material presented and to complete all course assignments.  If prior arrangements are made or extenuating circumstances exist, makeup of tests may be allowed.  Late homework papers will not be accepted unless those same extenuating circumstances exist.  Makeup of quizzes is to be at the instructor's discretion.

8. COURSE OUTLINE:
9. METHODS OF INSTRUCTION:
To be successful in this course, students are expected to participate in discussions, readings, in-class writing, and peer review activities. The instructor may assign point values to such activities.
10. ACADEMIC INTEGRITY:
The very nature of higher education requires that students adhere to accepted standards of academic integrity. Therefore, Pueblo Community College has adopted a policy of academic conduct as described in the Student Handbook. Violation of academic integrity may be defined to include the following: cheating, plagiarism, falsification and fabrication, abuse of academic materials, complicity in academic dishonesty, and personal misrepresentation. It is the student’s responsibility to be aware of the behaviors that constitute academic dishonesty. Sanctions for violating the standards of academic integrity may include warning, probation, suspension, and/or failure of the course or assignment at the discretion of the instructor.

11.

ADA NOTICE:
Students who have a documented disability may be eligible to receive accommodations for this class. Please contact the Disability Resources Center at 549-3446 for further information.